P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Revision:SEMI P30-0997 (Reapproved 1104) - Inactive 9-0298 (technical revision)

9-0298 (technical revision)

SEMI MF398 — Test Method for Majority Carrier Concentration in Semiconductors by Measurement of Wavelength of the Plasma Resonance Minimum

The premium wafer has tighter specification values in some specific items for the specific usage

including but not limited to adhesion test

P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Revision:SEMI P30-0997 (Reapproved 1104) - Inactive 9-0298 (technical revision)This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on July 23, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1997. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to