M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components This Standard was technically approved

This Standard was technically approved by the Gases Global Technical Committee

It may also be used to characterize other materials exhibiting resistivity in this range

SEMI MF1618 — Practice for Determination of Uniformity of Thin Films on Silicon Wafers

発生するESDイベントの存在と性質によって定義される。

M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components This Standard was technically approved* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1