S00600 - SEMI S6 - 半導體製造設備排氣通風基準 Revision:SEMI S6-0618 - Current SEMI F75-1102 (Reapproved 0309)

SEMI F75-1102 (Reapproved 0309)

This guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite

This Practice describes measurement site patterns and determination of their spatial coordinates on the wafer

2-0698 (Reapproved 0706)

S00600 - SEMI S6 - 半導體製造設備排氣通風基準 Revision:SEMI S6-0618 - Current SEMI F75-1102 (Reapproved 0309)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. Semiconductor Manufacturing EquipmentSME REF _Ref515551479 \h \r \t \* MERGEFORMAT 8 08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000E0000005F005200650066003500310035003500350031003400370039000000 Referenced SEMI StandardsSEMI F5 Guide for