C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded and alignment

and alignment

SEMI MF1188 –– Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption with Short Baseline

3D normal luminance uniformity

SEMI M42-0211 (technical revision)

C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded and alignmentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20033 (C4F8) (C4F8) Referenced SEMI Standards None.