TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare This Horiba STEC SEC-Z514MG is

This Horiba STEC SEC-Z514MG is manufacturer refurbished

Sput # 2/3 Cu Shield Kit (6")

Inventory # A-13183

Inventory # G2013

TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare This Horiba STEC SEC-Z514MG isTEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare Part No: ADH Adhesion Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 401692 19 BASE(HP) ASSY,BACK 5010 101312 12 FRAME (Qty. 1) 5003 300048 11 BRACKET(R) (Qty. 1) 5010 405342 11 PLATE (Qty. 1) 5003 300047 11 BRACKET(L) (Qty. 1) 5010