M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 NOTICE: This Document replaces the

NOTICE: This Document replaces the previous version of SEMI M6 along with SEMI M6

SEMI MF671-0312 (Reapproved 1023)

Sheet resistance is a primary quantity for characterization

2-0924 (technical revision)

M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 NOTICE: This Document replaces theThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1978; previously published November 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. These specifications cover requirements for monocrystalline silicon epitaxial