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UNIT Instruments UFC-1100A Mass Flow Controller MFC C2F6 O2 Ar Lot of 22 Working img{max-width:100%} Daihen HFA-30A-V RF MatchUNIT Instruments UFC 1100A Mass Flow Controller MFC C2F6 O2 Ar Lot of 22 Working Part No: UFC 1100A May Require Calibration Reseller Lot of 22 Included Components Part No: UFC 1100A Range Gas: 100 SCCM, C2F6 Quantity: 14 Part No: UFC 1100A Range Gas: 3 SLPM, C2F6 Part No: UFC 1100A Range Gas: 1 SLM, O2 Part No: UFC 1100A Range Gas: 5 SLM, O2 Part No: UFC 1100A Range Gas: 100 SCCM, O2 Quantity: 2 Part No: UFC 1100A Range Gas: 200 SCCM, O2 Part No: UFC