TEL Tokyo Electron 3M87-055471-11 Trias Module Controller-S 3M80-002347-11 Spare Part No: 03-20-01379

Part No: 03-20-01379

This unit was removed from a Kokusai Zestone DD-1203V 300mm

C200HE-CPU42E

SINGLE CHANNEL SCR CONTROL

TEL Tokyo Electron 3M87-055471-11 Trias Module Controller-S 3M80-002347-11 Spare Part No: 03-20-01379TEL Tokyo Electron 3M87 055471 11 Trias Module Controller S 3M80 002347 11 Spare Part No: 3M87 055471 11 Model No: TRIAS MODULE CONTROLLER Removed from a TEL Tokyo Electron Trias CVD Chemical Vapor Deposition System Installed Components 3M80 002347 11 3M80 002350 11 3M87 055526 13 This TEL Tokyo Electron 3M87 055471 11 Trias Module Controller is used working surplus. The unit has a minor dent to the upper cover (see photo). The physical condition is