F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current The user should investigate metrology

The user should investigate metrology suppliers’ current capabilities

and dead band of a thermal mass flow controller (MFC)

odorless and tasteless

Changes were made to ¶ 6

F02100 - SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments Revision:SEMI F21-1016 - Current The user should investigate metrologyThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published in 1995; previously published November 2002. NOTICE: This Document was completely rewritten in 2016. The purpose of this Standard is to classify microelectronics clean