T00800 - SEMI T8 - Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol Revision:SEMI T8-1110 (Reapproved 0322) - Current This Document is intended to

This Document is intended to help the semiconductor equipment supplier design equipment exhaust ventilation systems to a common set of performance criteria as well as to provide assistance to both users and suppliers in the understanding of exhaust ventilation requirements for equipment systems

This Document can be used as a Guide for equipment manufacturers during the design and testing of their equipment and by those who either use or produce reticles and other EES items

1995년에 초본이 출판되었고

Effective use of the metric to build a COO model requires identification of constraints and data values

T00800 - SEMI T8 - Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol Revision:SEMI T8-1110 (Reapproved 0322) - Current This Document is intended toThis Specification is intended to provide a marking symbology that can be used to mark glass flat panel display (FPD) substrates within the fixed quality area (FQA) of the edge exclusion area of the substrate. This Specification defines the geometric and spatial relationships and content (including the error checking and correcting code) of rectangular two dimensional (2D), machine readable, binary Data Matrix symbology for front surface or back