E19001 - SEMI E190.1 - Specification for Common Data for Etch Components Revision:SEMI E190.1-1124 - Current Short-Term Reproducibility

Short-Term Reproducibility

SEMI E48-95 (first published)

SEMI S2-0821 (technical revision)

7:30 AM– 3:00 PM  (Day 1)

E19001 - SEMI E190.1 - Specification for Common Data for Etch Components Revision:SEMI E190.1-1124 - Current Short-Term ReproducibilityNOTICE: By purchasing this download, you will receive the Primary Standard, SEMI E191 and the Subordinate Standard, SEMI E191. 1. If you purchase this download, you do not need to purchase the SEMI E191 download. 1 Purpose 1. 1 This Specification provides an implementation mapping of SEMI E190 Equipment Data Publication (EDP) Level Categories to Etch Components. 2 Scope 2. 1 This Specification is the faithful representation of level categories with