P02400 - SEMI P24 - CD測長手順 StdPbc-1020

P02400 - SEMI P24 - CD測長手順 StdPbc-1020NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the

半導体と電子デバイスの製造者で用いる製造技術は，高密度化および高複雑化の方向に進化し続けている。高集積化，内部接続の高階層化および素子間・導体間分離の微細化にともなって，電界に起因する問題に対する敏感性は増加している。この文書は，既存の静電気電荷の移動技術に加え，電界に関するより緻密な調査を通じて損傷問題に取り組むための推奨事項を提供している。

free space to allow data transmission

·        プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間

This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC‑Link IE standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment

Health & Safety Global Technical Committee

設備的使用者或其他相關團體也可使用本基準來評估和比較不同設備在設計上的潛藏風險或是附屬設備的設計、評估或修改。

SEMI F39-0699 (first published)

NOTE 1: The design and fabrication of the sawing guides and the determination of any geometrical parameters is considered outside the scope of this Test Method

This Standard will cover the quality criteria and the associated test method for impurities contained in PE bags used for polysilicon feedstock packaging

This Standard provides specification for equipment suppliers to:

They are not recommended for use in acceptance testing until their precision has been evaluated by interlaboratory comparison unless the parties to the test conduct suitable correlation studies

本ガイドは，Global Environmental Health and Safety Committeeで技術的に承認されたもので，North American Environmental Health & Safety Committeeが直接責任を負うものである。現版は，2001年8月27日にNorth American Regional Standards Committeeにて承認されている。2001年9月にまずwww