E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded in particular orientation

in particular orientation

本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww

Boron-Doped

데이터 수집 계획의 결과로 생성된 데이터의 포맷 또한 데이터 수집 계획 출력 값을 이용할 때 지원되는 인터페이스 형태로 정의된다

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded in particular orientationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)