F08600 - SEMI F86 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F86-0304 - Superseded SEMI T9-1110 (Reapproved 0216)

SEMI T9-1110 (Reapproved 0216)

This Specification is part of the SEMI sensor/actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC-Link standard

NOTICE: This Standard is no longer published with the SEMI E54 suite of Standards

本スタンダードは，6インチレチクルの出荷，搬送，および保管のために使用する150 mm極紫外線リソグラフィ（EUVL）レチクル用EUVポッドの仕様を記述している。EUVポッドは，外部ポッドと保護用の内部ポッドから構成される。EUVポッドは，従来のレチクルキャリアがEUVLの要件に適合しない場合に使用する。

F08600 - SEMI F86 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F86-0304 - Superseded SEMI T9-1110 (Reapproved 0216)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,