D06300 - SEMI D63 - FPDカラーフィルターの偏光解消効果測定法 Revision:SEMI D63-0811 - Superseded SEMI C38 — Guideline for

SEMI C38 — Guideline for Phosphorus Oxychloride

3  The series of data sheets included should address all site facilities necessary to support semiconductor equipment processing

This Document details the method to extract and measure organic contaminants present on the wetted surfaces

The intent of this Standard is not to suggest any specific testing program

D06300 - SEMI D63 - FPDカラーフィルターの偏光解消効果測定法 Revision:SEMI D63-0811 - Superseded SEMI C38 — Guideline forglobal Flat Panel Display Materials & Components Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org FPD Referenced SEMI Standards None.