Equipe Technologies FPD-3153 Transfer Robot Plasma-Therm Clusterlock 7000 Spare P1 This Mattson Technology 303-15664-00

P1 This Mattson Technology 303-15664-00 Process Showerhead is new surplus

35a M-511E Working Spare

This Komatsu Electronics ABBBA0011000 Heat Exchanger Power Supply is used working surplus

PCB Controller Board

Equipe Technologies FPD-3153 Transfer Robot Plasma-Therm Clusterlock 7000 Spare P1 This Mattson Technology 303-15664-00Equipe Technologies FPD 3153 Transfer Robot Plasma Therm Clusterlock 7000 Spare Part No: FPD 3153 Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System Installed PCB Part No: 2002 0080, FDP400 Interface This item is working surplus. The robot is missing one of the cover panels and also includes a lower frame ring (see photos). The physical condition is good, but there are signs of previous use and handling. Sale Details Item